Defect Inspection & Analysis Equipment
These tools inspect wafers for physical or chemical defects, ensuring quality control and process optimization.
LASERTEC SICA88 – Defect Analyzer
Laser-based analyzer for surface defect inspection on SiC wafers with high accuracy and resolution.
Optical inspection system for identifying surface and sub-surface wafer defects.
KLA CANDELA 8520 – Defect Analyzer
ICP-MS – Metal Contamination Tester
Inductively Coupled Plasma Mass Spectrometer used to detect trace metal contamination on wafer surfaces.
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